JPH0250953U - - Google Patents
Info
- Publication number
- JPH0250953U JPH0250953U JP12888488U JP12888488U JPH0250953U JP H0250953 U JPH0250953 U JP H0250953U JP 12888488 U JP12888488 U JP 12888488U JP 12888488 U JP12888488 U JP 12888488U JP H0250953 U JPH0250953 U JP H0250953U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- vacuum chamber
- carrier
- load lock
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12888488U JPH0250953U (en]) | 1988-09-30 | 1988-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12888488U JPH0250953U (en]) | 1988-09-30 | 1988-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0250953U true JPH0250953U (en]) | 1990-04-10 |
Family
ID=31382639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12888488U Pending JPH0250953U (en]) | 1988-09-30 | 1988-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0250953U (en]) |
-
1988
- 1988-09-30 JP JP12888488U patent/JPH0250953U/ja active Pending